Thermoelastic damping in micro-beam resonators
نویسندگان
چکیده
منابع مشابه
Suppression of thermoelastic damping in MEMS beam resonators by piezoresistivity
Microelectronic mechanical (MEM) beam resonators with high quality factors are always preferred in practical applications. As one of the damping sources, thermoelastic damping (TED) caused by irreversible heat flows is usually considered as an upper limit of the overall damping effect. A new method is proposed in this work to compensate TED by taking advantage of the piezoresistive effect. Such...
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ژورنال
عنوان ژورنال: International Journal of Solids and Structures
سال: 2006
ISSN: 0020-7683
DOI: 10.1016/j.ijsolstr.2005.08.011